AIN CERAMIC PULSE HEATER for TSV Package

• High-speed Heating Performance
  50 ℃ → 450 ℃ : 2.0sec,
  450 ℃ → 100 ℃ : 5.0sec / Uniform Temp Distribution in the Face : +/- 5C (+/-1%)
• Uniform Pressure with Less Heat Distortion: Below 1μm in the Face